Investigation of correlations between parameters defining the state of sputtered particles

Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/7237

Title:	Investigation of correlations between parameters defining the state of sputtered particles
Authors:	VLEKKEN, Johan CROES, Kristof D'OLIESLAEGER, Marc KNUYT, Gilbert Vandervorst, W. DE SCHEPPER, Luc
Issue Date:	1998
Publisher:	Chichester Wiley 1998
Source:	Proceedings of the 11th International Conference on Secondary Ion Mass Spectrometry (SIMS 11, Orlando, Fla, USA, 7-12 September 1997). p. 931-934.
Document URI:	http://hdl.handle.net/1942/7237
Type:	Proceedings Paper
Appears in Collections:	Research publications

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