Please use this identifier to cite or link to this item: http://hdl.handle.net/1942/7237
Title: Investigation of correlations between parameters defining the state of sputtered particles
Authors: VLEKKEN, Johan 
CROES, Kristof 
D'OLIESLAEGER, Marc 
KNUYT, Gilbert 
Vandervorst, W.
DE SCHEPPER, Luc 
Issue Date: 1998
Publisher: Chichester Wiley 1998
Source: Proceedings of the 11th International Conference on Secondary Ion Mass Spectrometry (SIMS 11, Orlando, Fla, USA, 7-12 September 1997). p. 931-934.
Document URI: http://hdl.handle.net/1942/7237
Type: Proceedings Paper
Appears in Collections:Research publications

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