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Title: | Investigation of correlations between parameters defining the state of sputtered particles | Authors: | VLEKKEN, Johan CROES, Kristof D'OLIESLAEGER, Marc KNUYT, Gilbert Vandervorst, W. DE SCHEPPER, Luc |
Issue Date: | 1998 | Publisher: | Chichester Wiley 1998 | Source: | Proceedings of the 11th International Conference on Secondary Ion Mass Spectrometry (SIMS 11, Orlando, Fla, USA, 7-12 September 1997). p. 931-934. | Document URI: | http://hdl.handle.net/1942/7237 | Type: | Proceedings Paper |
Appears in Collections: | Research publications |
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