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Title: | Nanocrystalline diamond-based field-effect capacitive pH sensor | Authors: | CHRISTIAENS, Pieter Abouzar, Maryam H. Poghossian, A. Wagner, T. BIJNENS, Nathalie WILLIAMS, Oliver DAENEN, Michael HAENEN, Ken Schoning, M.J. WAGNER, Patrick |
Issue Date: | 2007 | Publisher: | IEEE | Source: | TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2. p. U954-U955. | Abstract: | The pH-sensitive properties of field-effect capacitive electrolyte-diamond-insulator-semiconductor (EDIS) sensors with undoped nanocrystalline diamond (NCD) thin films (100-500 nm) having hydrogen (H)- and oxygen (O)-terminated surfaces have been investigated. The NCD films were grown on P-Si-SiO2 substrates by a microwave plasma-enhanced chemical vapour deposition from a mixture of methane and hydrogen. The EDIS sensors have been characterised by means of capacitance-voltage spectroscopy, constant-capacitance and impedance-spectroscopy method. The developed EDIS sensors with O-terminated and H-terminated NCD surfaces show an average pH sensitivity of 38 mV/pH and 34-36 mV/pH, respectively. A possible mechanism of the pH sensitivity is discussed. | Notes: | Hasselt Univ, Inst Mat Res, Diepenbeek, Belgium.Christiaens, P, Hasselt Univ, Inst Mat Res, Diepenbeek, Belgium. | Keywords: | nanocrystalline diamond, field-effect, pH sensor | Document URI: | http://hdl.handle.net/1942/7781 | ISBN: | 978-1-4244-0841-2 | ISI #: | 000249603700470 | Category: | C1 | Type: | Proceedings Paper | Validations: | ecoom 2009 |
Appears in Collections: | Research publications |
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