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http://hdl.handle.net/1942/9874
Title: | Nanocrystalline diamond piezoresistive sensor | Authors: | Kulha, P. Kromka, A. Babchenko, Oleg Vanecek, M. Husak, M. WILLIAMS, Oliver HAENEN, Ken |
Issue Date: | 2009 | Publisher: | PERGAMON-ELSEVIER SCIENCE LTD, THE BOULEVARD, LANGFORD LANE, KIDLINGTON, OXFORD OX5 1GB, ENGLAND | Source: | VACUUM, 84(1). p. 53-56 | Abstract: | The design, fabrication and test of piezoresistive sensors based on nanocrystalline diamond (NCD) films are reported. The CoventorWare FEM calculations of the mechanical stress and geometrical deformations of a 3-D structure are used for a proper localization of the piezoresistor on the carrying substrate. The boron-doped piezoresistive sensing element was realized using a directed patterned growth of NCD film on SiO2/Si by microwave plasma-enhanced chemical vapour deposition (CVD). The gauge factor of borondoped NCD films was investigated in the range from room temperature up to 200 C and from 0 to 5 N of the applied force. These NCD piezoresistive sensor elements are compared with a Silicon-on-Insulator (SOI) based piezoresistive sensor and their high-temperature applications are discussed. | Notes: | Addresses: 1. Czech Tech Univ, Prague 16627, Czech Republic 2. ASCR, Inst Phys, Prague 16200, Czech Republic 3. Hasselt Univ, Inst Mat Res, IMO, B-3590 Diepenbeek, Belgium 4. IMEC VZW, Div IMOMEC, B-3590 Diepenbeek, Belgium E-mail Addresses: kulhap@fel.cvut.cz | Keywords: | VAPOR-DEPOSITED DIAMOND; FILMS | Document URI: | http://hdl.handle.net/1942/9874 | ISSN: | 0042-207X | e-ISSN: | 1879-2715 | DOI: | 10.1016/j.vacuum.2009.04.023 | ISI #: | 000270625900012 | Category: | A1 | Type: | Journal Contribution | Validations: | ecoom 2010 |
Appears in Collections: | Research publications |
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